Mitisha Surana

Materials scientist and an artist

I’m a scientist, engineer, and perpetual learner fascinated by how things work — from atoms and materials to the technologies shaping our future.

3patents filed
12publications
PhDMaterials Eng., UIUC
Illustration of a semiconductor wafer settling from uneven to uniform thin-film thickness

What a good deposition run looks like: thickness converging to the same value, cell to cell.

About

I’m a materials scientist and engineer attracted to problems where deep science meets tangible impact. For me, solving a challenge isn't just about making it work - it's also about understanding the "why" behind the solution

I did my PhD and MS in Materials Science and Engineering at the University of Illinois at Urbana-Champaign, advised by Prof. Sameh Tawfick, and my B.E. in Materials Science and Engineering at Anna University in Chennai, India. My doctoral work focused on the "wonder material" graphene, specifically exploring the fascinating relationship between this 2D material and the surfaces it grows on. Today, I work on the chemistry and process engineering behind the transistors inside modern chips at ASM, enabling the next iPhones and AI infrastructure around the world

Outside of work, I’m happiest exploring something new. I love painting, spontaneous road trips, music, badminton, and saying yes to experiences that make life more interesting. I’m a curious person, drawn to meaningful conversations, and always looking for the next thing to learn, build, or experience. Ambitious about what’s next, curious about everything in between!

Experience

Sep 2023 — Present

Senior Process Engineer

ASM America, Phoenix, Arizona

  • Leading process development and optimization for epitaxial CVD (Group IV), specializing in gate-all-around (GAA) substrate deposition for next-generation semiconductor technologies.
  • Reduced film uniformity variation by over 50% on a new CVD platform, enabling enhanced device performance.
  • Mitigated a key defect metric by 90% for a critical application impacting every die on a wafer, and cut overhang deposition defects by 70% through targeted process optimization.
  • Designed and executed 30+ Design of Experiments (DOEs) across different metrics, improving tool-matching efficiency to fewer than 3 qualification runs and accelerating deployment timelines.
  • Led cross-functional collaboration across hardware, process, and R&D to deliver a next-generation tool, achieving installation at the industry's top three customers for next-generation process nodes.
  • Mentored engineers on the advanced CVD platform and authored the transition and knowledge-transfer documentation used to migrate global customer sites from legacy tools.
  • 3 patents filed in advanced semiconductor manufacturing and yield improvement, 2025–2026.

May 2022 — Aug 2022

Process Engineer Intern

Applied Materials, Chemistry Center for Excellence, Santa Clara, California

  • Optimized self-assembled monolayer deposition for selective etching of thin films.
  • Developed atomic layer deposition processes for metals on silicon and glass.

Doctoral research

Graduate Research Assistant, University of Illinois at Urbana-Champaign · Sep 2018 – Aug 2023
Advised by Prof. Sameh Tawfick

Mechanics of the graphene-metal interface

Devised a non-destructive method pairing electron backscatter diffraction with atomic force microscopy to determine the crystallographic orientation of catalyst-surface facets formed by graphene-metal interaction, and built an analytical model of the faceting energetics to explain which orientations are favored.

Ran statistical analysis on the faceting behavior to understand how facet size depends on both external process conditions and internal material factors.

Graphene-metal nanocomposites for flexible electronics

Fabricated ribbon-like and patterned metal structures via lithography, wet etching, and reactive ion etching on sputtered Pd and Pt films that served as graphene-growth catalysts.

Measured a 30% increase in modulus from strain in the graphene and carbide formation in the metal, and a 40% improvement in fracture resistance under tensile and fatigue loading compared to bare-metal controls.

GrResQ: a crowd-sourced graphene CVD database

Explored the parameter space for chemical-vapor-deposited monolayer graphene across various thin-film and foil catalysts using design of experiments, feeding a data-driven analysis platform.

Built the GUI for the GrResQ application on NanoHUB and enabled efficient large-scale analysis of Raman map scans within the suite.

Skills

Experimental techniques

LPCVD / APCVD Sputtering SEM / EDS EBSD Raman spectroscopy XRD XRR AFM FTIR Ellipsometry TEM Surfscan defect analysis

Software

JMP Python Abaqus Origin HighScore Minitab MATLAB

Patents & publications

Work spanning semiconductor process patents, peer-reviewed papers, and conference presentations from my time in industry and at UIUC.

Patents

2026

Robinson James, Mitisha Surana, et al. Chamber arrangements with offset upper reflectors, semiconductor processing systems, and related methods of making chamber arrangements and depositing material layers onto substrates. US20260005050A1.View patent

2026

Caleb Miskin, Mitisha Surana, et al. Chamber arrangements with offset heater element arrays, semiconductor processing systems, and methods of making chamber arrangements and depositing material layers onto substrates. US20260005045A1.View patent

Publications & presentations

2024

Jad Yaacoub, Mitisha Surana, et al. Graphene-Induced Surface Softening and Nanostructure Evolution of Platinum Foils. Advanced Engineering Materials 26.23: 2401053.

2024

Kaihao Zhang, Mitisha Surana, et al. Ultrathin Damage-Tolerant Flexible Metal Interconnects Reinforced by in-situ Graphene Synthesis. npj Flexible Electronics 8.1: 16.

2024

Jad Yaacoub, Mitisha Surana, et al. Graphene-Induced Surface Stiffening of Copper Studied by Nanoindentation. The Journal of Physical Chemistry C 128.8: 3449–3459.

2023

Mitisha Surana, et al. Strain-driven faceting of graphene-catalyst interface. Nano Letters 23.5: 1659–1665.

2022

Jad Yaacoub, Mitisha Surana, et al. Flexible and damage-tolerant metal-graphene nanocomposites. MRS Spring Conference, Hawaii.

2022

Mitisha Surana, et al. Interface mechanics of 2D materials on metal substrates. Journal of the Mechanics and Physics of Solids: 104831.

2021

Mitisha Surana, et al. Evolution of the graphene-metal interface during chemical vapor deposition. MRS Fall Conference, Boston.

2021

G. Ananthakrishnan, Mitisha Surana, et al. Graphene-mediated stabilization of surface facets on metal substrates. J. Appl. Phys. 130: 165302.

2021

Mitisha Surana, Joshua Schiller, et al. Graphene Rescue (Gr-ResQ): A crowd-sourced database with analysis tools. Future Directions in Nanomaterial Synthesis Conference.

2020

Joshua A. Schiller, Mitisha Surana, et al. Crowd-Sourced Data and Analysis Tools for Advancing the Chemical Vapor Deposition of Graphene: Implications for Manufacturing. ACS Applied Nano Materials 3.10: 10144–10155.

2020

Kaihao Zhang, Mitisha Surana, Richard Haasch, Sameh Tawfick. Elastic modulus scaling in graphene-metal composite nanoribbons. Journal of Physics D: Applied Physics 53.18: 185305.

2019

Mitisha Surana, Kaihao Zhang, Sameh Tawfick. Mechanics of the graphene-metal interface. Society of Engineering Sciences Conference, Washington University in St. Louis.

Education

PhD, Materials Engineering

University of Illinois at Urbana-Champaign

Aug 2023
GPA 3.71 / 4.00

MS, Materials Engineering

University of Illinois at Urbana-Champaign

May 2020
GPA 3.85 / 4.00

B.E., Materials Science and Engineering

Anna University, Chennai, India

May 2018
GPA 9.37 / 10.00 — Dept. Rank 1